Point defects are where an atom is missing or is in an irregular place in the lattice structure. Point defects include self interstitial atoms, interstitial impurity atoms, substitutional atoms and vacancies.
A substitutional impurity atom is an atom of a different type than the bulk atoms, which has replaced one of the bulk atoms in the lattice.
Interstitial impurity atoms are much smaller than the atoms in the bulk matrix. Interstitial impurity atoms fit into the open space between the bulk atoms of the lattice structure.