An ideal MOS capacitor has boron doping concentration of
1015cm−3 in the substrate. When a gate voltage is applied , a depletion region of width
0.5μm is formed with a surface (channel) potential of
0.2 V. Given that
ϵ0=8.854×10−14F/cm and the relative permittivities of silicon and silicon dioxide are
12 and
4, respectively,te peak electric field (in
V/μm) in the oxide region is
- 2.4