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Question

An ideal MOS capacitor has boron doping concentration of 1015cm3 in the substrate. When a gate voltage is applied , a depletion region of width 0.5μm is formed with a surface (channel) potential of 0.2 V. Given that ϵ0=8.854×1014F/cm and the relative permittivities of silicon and silicon dioxide are 12 and 4, respectively,te peak electric field (in V/μm) in the oxide region is
  1. 2.4

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Solution

The correct option is A 2.4
Peak electric field in the oxide region is
Eox=ϵsϵoxEs
and Es=0.2×20.5
Es=0.8 V/μm
Eox=124×0.8
Eox=2.4 V/μm

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