CO2−3 - Here the central atom C is sp2 hybridised and hence it is planar.
.CH3 - Here the central atom C is sp2 hybridised and hence it is also planar.
.CF3 - Here the central atom C is sp3 hybridised. Hence, its shape is pyramidal.
BeCl2 - Here the central atom Be is sp hybridised. So, its shape is linear and also planar.
B2H6 - Here both the B atoms are in sp3 hybridization state and each boron contains two types of boron-hydrogen bond. The bridging hydrogen atoms are not in the plane of the molecule.
H3PO2 - Here the central atom P is sp3 hybridised. Thus, it is tetrahedral.
SO3 - Here the central atom S is sp2 hybridised. So, it is also planar.
BF3 - Here also the central atom B is sp2 hybridised. Thus, it is also planar.
XeF4 - Here the central atom Xe is sp3d2 hybridised. But, it has two lone pairs of electrons. Thus, its shape is square planar.